Slim High-Precision Vertical Stage
ZA07A-X102

| Model Number | Ezi-Robo-PMS-☐ ☐-42M-☐-ZA07A-X102 | |
|---|---|---|
| Vertical Specification | ||
| Table Size | 70 × 70mm | |
| Travel Range | ±10mm | |
| Lead Mechanism | Ground Screw, Lead 0.5mm | |
| Height | 50mm | |
| Guide | Cross Roller Guide | |
| Resolution *1 | 0.5㎛ | |
| Max. Speed | 2.5mm/sec | |
| Repeatability(XY) | Less ±0.5㎛ | |
| Lost Motion | Less 1.5㎛ | |
| Straightness(Vertical) | Less 7㎛ / 20mm | |
| Motor | EzM-28M(FASTECH) | |
