Slim High-Precision X Stage
XA05A-R201
- Table Size(mm)
- • 50 × 50
1. Main features
- • High precision ultra-slim X Stage for high accuracy of positioning
- • Provide DLL Library for PC(Window) interface
- • High precision Ball Screw mechanism accomplished Long life
- • Position Accuracy Improvement than convertional 5 phase stepping motor by combination with High Accuracy Optical Encoder of Ezi-SERVO
2. Specification
| Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-XA05A-R201 |
|---|---|
| X Specification | |
| Table Size | 50 × 50mm |
| MotionRange | ±7.5mm |
| Lead Mechanism | Ball Screw, Lead 1.0mm |
| Height | 20mm |
| Guide | Cross Roller Guide |
| Resolution *1 | 1㎛ |
| Max. Speed | 5mm/sec |
| Repeatability(X) | Less ±0.2㎛ |
| Lost Motion | Less ±0.5㎛ |
| Straightness | Less 1㎛ / 15mm |
| Backlash | Less 0.2㎛ |
| Motor | EzM-28M(FASTECH) |
- * 1 : Specification based on Ezi-SERVO 28M Motor resolution as 1,000[Step/rev].
3. Application
- • Alignment, measurement and bonding of small substrates such as LCD or OLED
- • Mark alignment on screen printers
- • Probe Inspection Equipment
- • Round glass cutting process
- • Alignment and evaluation of optical equipment, medical equipment, and biotechnology equipment
Ezi-Robo-PMS-☐ ☐-28M-D-XA05A-R201
