Slim High-Precision XYθ Alignment Stage
YRA-130-KO
- Table Size(mm)
- • 130 × 130
1. Main Features
- • High precision XYθ Stage for high accuracy of positioning Optical Encoder of Ezi-SERVO
- • Provide DLL Library for PC(Window) interface
- • Ultra-slim stage with integrated 3-axis structure
- • High precision Ball Screw mechanism accomplished Long life
- • Equipped with center hole opening while full stroke moving
- • Position Accuracy Improvement than convertional 5 phase stepping motor by combination with High Accuracy Optical Encoder of Ezi-SERVO
2. Specification
| Model Number | Ezi-Robo-PMS-☐ ☐-28M-D-YRA-130-KO | |
|---|---|---|
| XY Specification | θ Specification | |
| Table Size | 130 × 130mm | |
| Travel Range | ±5mm | ±5° |
| Lead Mechanism | Ball Screw, Lead 1.0mm | |
| Height | 60mm | |
| Guide | Cross Roller Guide, Cross Roller Bearing | |
| Resolution *1 | 0.001mm/step | 0.000674°/step |
| Max. Speed | 5mm/sec | 3.37°/sec |
| Repeatability(XY) | Less ±0.5㎛ | - |
| Angular Repeatability(θ) | - | Less 0.001° |
| Lost Motion | Less 2㎛ | Less 0.005° |
| Straightness | Less 1㎛ / 10mm | - |
| Backlash | Less 1㎛ | Less 0.005° |
| Motor | EzM-28M(FASTECH) | |
- * 1 : Specification based on Ezi-SERVO 28M Motor resolution as 1,000[Step/rev].
3. Application
- • Camera and laser alignment
- • Alignment measurement and bonding of small substrates such as LCD or OLED
- • Mark alignment on screen printers
- • Alignment and evaluation of optical equipment, medical equipment, and biotechnology equipment
Ezi-Robo-PMS-☐ ☐-28M-D-YRA-130-KO
